- Title
- High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy
- Creator
- Maroufi, Mohammad; Fowler, Anthony G.; Bazaei, Ali; Moheimani, S. O. Reza
- Relation
- Review of Scientific Instruments Vol. 86, Issue 2
- Publisher Link
- http://dx.doi.org/10.1063/1.4907908
- Publisher
- AIP Publishing
- Resource Type
- journal article
- Date
- 2015
- Description
- A 2-degree of freedom microelectromechanical systems nanopositioner designed for on-chip atomic force microscopy (AFM) is presented. The device is fabricated using a silicon-on-insulator-based process and is designed as a parallel kinematic mechanism. It contains a central scan table and two sets of electrostatic comb actuators along each orthogonal axis, which provides displacement ranges greater than ±10 µm. The first in-plane resonance modes are located at 1274 Hz and 1286 Hz for the X and Y axes, respectively. To measure lateral displacements of the stage, electrothermal position sensors are incorporated in the design. To facilitate high-speed scans, the highly resonant dynamics of the system are controlled using damping loops in conjunction with internal model controllers that enable accurate tracking of fast sinusoidal set-points. To cancel the effect of sensor drift on controlled displacements, washout controllers are used in the damping loops. The feedback controlled nanopositioner is successfully used to perform several AFM scans in contact mode via a Lissajous scan method with a large scan area of 20 µm x 20 µm. The maximum scan rate demonstrated is 1 kHz.
- Subject
- microelectromechanical systems nanopositioner; MEMS nanopositioner; microscopy
- Identifier
- http://hdl.handle.net/1959.13/1336077
- Identifier
- uon:27540
- Identifier
- ISSN:0034-6748
- Rights
- This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Maroufi M, Fowler AG, Bazaei A, Moheimani SOR, 'High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy', Review of Scientific Instruments, Vol. 86, Article ID 023705 (2015) and may be found at http://aip.scitation.org/doi/10.1063/1.4907908.
- Language
- eng
- Full Text
- Reviewed
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